Svensk definition
En typ av apparater med både elektriska och mekaniska delar som har åtminstone någon dimension i ett mikrometerintervall (mellan 1 mikrometer och 1 millimeter). Hit hör sensorer, manöverdon, mikrokanaler och mikropumpar.
Micro-Electrical-Mechanical Systems
Mikroelektromekaniska system
Engelsk definition
A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron and 1 millimeter). They include sensors, actuators, microducts, and micropumps.
Svenska synonymer
MEMS
Engelska synonymer
Micro Electrical Mechanical Systems — Micro-Electrical-Mechanical System — System, Micro-Electrical-Mechanical — Systems, Micro-Electrical-Mechanical — MEMS — Micro-Electro-Mechanical Systems — Micro Electro Mechanical Systems — Micro-Electro-Mechanical System — System, Micro-Electro-Mechanical — Systems, Micro-Electro-Mechanical — BioMEMS